Abstract: The paper shows information of distortion of measurement results by stylus method. The review of surface topography reconstruction method is presented. These methods were used by the present authors to reconstruct one-process and two-process modeled and measured profiles. In the final part of the paper, example results of surface profile reconstruction are given.

Keywords: Surface topography, stylus method, surface reconstruction, simulation

ACM Classification Keywords: J.2 Physical Sciences And Engineering; G.1.2 Approximation; G.1.3 Numerical Linear Algebra;

Link:

METHODS OF RECONSTRUCTION OF SURFACE PROFILES MEASURED BY STYLUS METHOD

Sławomir Górka, Paweł Pawlus

http://foibg.com/ibs_isc/ibs-27/ibs-27-p25.pdf