Abstract: Determination of the so-called optical constants (complex refractive index N, which is usually a function of the wavelength, and physical thickness D) of thin films from experimental data is a typical inverse non-linear problem. It is still a challenge to the scientific community because of the complexity of the problem and its basic and technological significance in optics. Usually, solutions are looked for models with 3-10 parameters. Best estimates of these parameters are obtained by minimization procedures. Herein, we discuss the choice of orthogonal polynomials for the dispersion law of the thin film refractive index. We show the advantage of their use, compared to the Selmeier, Lorentz or Cauchy models.

Keywords: Thin films; Materials and process characterization

ACM Classification Keywords: J.2 Physical Sciences and Engineering (Physics)

Link:

MODELING OPTICAL RESPONSE OF THIN FILMS: CHOICE OF THE REFRACTIVE INDEX DISPERSION LAW

Peter Sharlandjiev, Georgi Stoilov

http://www.foibg.com/ijitk/ijitk-vol02/ijitk02-2-p08.pdf