Abstract: This paper presents the results of application of numerical methods for surface topography analysis. Surface profiles after one and two-processes were computer generated. The effect of various tip radii on distortion of surface topography measurement results was analysed.

Keywords: surface topography; roughness; stylus measurement; tip radius

ACM Classification Keywords: J.2 Physical Sciences And Engineering; G.1.2 Approximation; G.1.3 Numerical Linear Algebra;

Link:

SIMULATION OF THE EFFECT OF STYLUS TIP RADIUS ON THE RESULTS OF SURFACE TOPOGRAPHY MEASUREMENT

Sławomir Górka, Paweł Pawlus

http://foibg.com/ibs_isc/ibs-20/ibs-20-p26.pdf